Kinetics of Evaporation of Barium THD Precursors Used for Organometallic Chemical Vapor Deposition (OMCVD) Thin Films

Citation:

Burtman, V. ; Schieber, M. ; Yaroslavsky, Y. ; Yitzchaik, S. Kinetics of Evaporation of Barium THD Precursors Used for Organometallic Chemical Vapor Deposition (OMCVD) Thin Films. Journal of Crystal Growth 1997, 174, 801-805.

Abstract:

Various methods have been used to synthesize Ba(THD)2 and its molecular structure has been studied using nuclear magnetic resonance. Compared with Raman and infrared spectroscopy it was found that NMR is very useful to determine quantitatively the decomposition through aging of Ba(THD)2. The transport kinetics of Ba(THD)2 has been studied under experimental conditions of a OMCVD reactor. It has been found that the freshly prepared Ba(THD)2 by the reaction of Ba metal with THD ligand in anhydrous conditions with subsequent crystallization from methanol transported quantitatively without decomposition. A simple model shows that the transport kinetics corresponds to a diffusion controlled process.

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Last updated on 04/12/2016